1.

Conference Proceedings
Conference Proceedings
1. Fullerene Derivatives as Novel Resist Materials for Fabrication of MEMS Devices by Electron Beam Lithography
Robinson, A.P.G ; Palmer, R.E. ; Preece, J.A. ; Shelley, E.J. ; Kanayama, T. ; Tada, T.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.219-224,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
2.

Conference Proceedings
Conference Proceedings
2. ELECTRON BEAM INDUCED DEGRADATION OF 2DEG IN AlGaAs/GaAs HETEROSTRUCTURE
Wada, T. ; Kanayama, T. ; Ichimura, S. ; Sugiyama, Y. ; Komuro, M.
Pub. info.: Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A..  pp.67-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 325