Roman, P. ; Kashkoush, I. ; Novak, R.E. ; Kamieniecki, E. ; Ruzyllo, J.
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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.344-349, 1995. Pennington, NJ. Electrochemical Society
Roman, P. ; Hwang, D. ; Torek, K. ; Ruzyllo, J. ; Kamieniecki, E.
Pub. info.:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.401-, 1995. Pittsburgh, PA. MRS - Materials Research Society