1.

Conference Proceedings

Conference Proceedings
K. Mori ; N. Nguyen ; D. Keeton ; R. Burns
Pub. info.: Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas.  pp.62-69,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2334
2.

Conference Proceedings

Conference Proceedings
K. Mori ; M. Sakamoto ; I. Miyamoto
Pub. info.: ICALEO '93 : laser materials processing : proceedings : 24-28 October 1993, Orlando, Florida.  pp.413-424,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2306