1.

Conference Proceedings

Conference Proceedings
Dunn, J. ; Joseph, A. ; Harame, D. ; Nowak, E.J. ; Meyerson, B.S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.27-44,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings

Conference Proceedings
St Onge, S. ; Joseph, A. ; Lanzerotti, L. ; Feiichenfeld, N. ; Coolbaugh, D. ; Orner, B. ; Dunn, J. ; Harame, D.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.193-205,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06