1.
|
Conference Proceedings
|
Dunn, J. ; Joseph, A. ; Harame, D. ; Nowak, E.J. ; Meyerson, B.S.
Pub. info.: |
ULSI Process Integration : proceedings of the International Symposium. pp.27-44, 2005. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2005-06 |
|
2.
|
Conference Proceedings
|
St Onge, S. ; Joseph, A. ; Lanzerotti, L. ; Feiichenfeld, N. ; Coolbaugh, D. ; Orner, B. ; Dunn, J. ; Harame, D.
Pub. info.: |
ULSI Process Integration : proceedings of the International Symposium. pp.193-205, 2005. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2005-06 |
|