1.

Conference Proceedings
Conference Proceedings
1. Stress Control of Si-Based PECVD Dielectrics
Mackenzie, K.D. ; Johnson, D.J. ; DeVre, M.W. ; Westerman, R.J. ; Reelfs, B.H.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.148-159,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
2.

Conference Proceedings
Conference Proceedings
2. Comparison of endpoint methods in advanced photomask etch applications
Johnson, D.J. ; Plumhoff, J. ; Shin, J. ; Rausa, E.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.40-49,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889