1.
|
Conference Proceedings
|
Lee,D.H. ; Kim,D.W. ; Lee,J.K. ; Jeong,W.G. ; Choi,S.-S. ; Jung,S.-M. ; Jeong,S.-H.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.571-576, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|
2.
|
Conference Proceedings
|
Jeong,W.G. ; Lee,S.W. ; Kim,D.H. ; Yoon,Y.J. ; Lee,D.H. ; Choi,B.Y. ; Choi,S.-S. ; Jung,S.M. ; Jeong,S.-H.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.99-110, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|