1.

Conference Proceedings
Conference Proceedings
1. EFFECTS OF RESIDUAL IRON CONTAMINATION INTRODUCED DURING WET CHEMICAL PROCESSING ON THIN OXIDE BREAKDOWN AND RELIABILITY CHARACTERISTICS
Henley, W.B. ; Jastrzebski, L. ; Haddad, N.F.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.487-494,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE
Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.530-536,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings
Conference Proceedings
3. Surface Photovoltage Characterization of Low Temperature Annealed LPCVD Silicon on Glass
Sen, S. ; Hoff, A.M. ; Moradi, B. ; Lagowski, J. ; Jastrzebski, L.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.269-278,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35
4.

Conference Proceedings
Conference Proceedings
4. Analysis of Hydrogenation in Thin Film Polycrystalline Silicon Using Surface Photovoltage Measurement Technique
Henley, W. ; Ostepenko, S. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.265-268,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35
5.

Conference Proceedings
Conference Proceedings
5. Enhanced Hydrogenation of Interface Bulk and Surface Traps in Polycrystalline Silicon Thin Films Subjected to Ultrasound Treatment
Ostapenko, S. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.61-67,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35