Furukawa, H. ; Nitta, S. ; Hioki, M. ; Iwasaki, T. ; Itoh, T. ; Nonomura, S.
Pub. info.:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.465-, 1999. Warrendale. MRS - Materials Research Society
Aono, N. ; Itoh, T. ; Iwasaki, T. ; Nitta, S. ; Nonomura, S. ; Yokoi, H.
Pub. info.:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.291-296, 1999. Warrendale, Pa.. Materials Research Society
Itoh, T. ; Nitta, S. ; Nonomura, S. ; Ushikoshi, K. ; Yamamoto, K.
Pub. info.:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.. pp.317-322, 1999. Warrendale. Materials Research Society