Gu, S. ; Zheng, Y. ; Zhang, R. ; Wang, R. ; Han, P. ; Huang, X. ; Zhong, P. ; Hu, L. ; Zhu, S. ; Chen, J. N.
Pub. info.:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.57-, 1994. Pittsburgh, PA. MRS - Materials Research Society