Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.397-402, 1988. Pittsburgh, Pa.. Materials Research Society
Kitahama, K. ; Hirata, K. ; Nakamatsu, H. ; Kawai, S. ; Fujimori, N. ; Imai, T.
Pub. info.:
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.309-318, 1987. Pittsburgh, Pa.. Materials Research Society