1.
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Conference Proceedings
|
Hemker, D.J. ; Qian, X.Y. ; Lum, R.T. ; Hills, G.W.
Pub. info.: |
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control. pp.149-159, 1993. Pennington, NJ. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
1993-21 |
|
2.
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Conference Proceedings
|
Lum, R. ; Tsai, P. ; Furr, M. ; Bucknall, R.E. ; Wiltse, M. ; Hills, G.W.
Pub. info.: |
Proceedings of the tenth symposium on plasma processing. pp.254-263, 1994. Pennington, NJ. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
1994-20 |
|
3.
|
Conference Proceedings
|
Jha, N. ; Shin, H. ; Hills, G.W. ; Qian, X.Y. ; Hu, C.
Pub. info.: |
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control. pp.319-330, 1993. Pennington, NJ. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
1993-21 |
|
4.
|
Conference Proceedings
|
Su, J. ; Hills, G.W. ; Tsai, P.
Pub. info.: |
Proceedings of the tenth symposium on plasma processing. pp.291-299, 1994. Pennington, NJ. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
1994-20 |
|