Kawachi, T. ; Nagashima, K. ; Kishimoto, M. ; Hasegawa, N. ; Tanaka, M. ; Ochi, Y. ; Nishikino, M. ; Lawazome, H. ; Tai, R. Z. ; Namikawa, K. ; Kato, Y.
Pub. info.:
Soft X-Ray Lasers and Applications VI. pp.59190L-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Fujii, A. ; Sasaki, S. ; Shimizu, M. ; Kobayashi, Y. ; Tominaga, T. ; Hoga, M. ; Mohri, H. ; Hayashi, N. ; Hayano, K. ; Hasegawa, N. ; Hosono, K. ; Arai, T.
Pub. info.:
24th Annual BACUS Symposium on Photomask Technology. pp.960-967, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering