1.

Conference Proceedings
Conference Proceedings
1. The use of titanium and titanium dioxide as masks for deep silicon etching
Powell, O.J. ; Sweatman, D. ; Harrison, H.B.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.26-35,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
2.

Conference Proceedings
Conference Proceedings
2. QsRAM: the new memory technology
Dimitrijev, S. ; Harrison, H.B.
Pub. info.: Microelectronics: Design, Technology, and Packaging.  pp.137-143,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5274