1.

Conference Proceedings
Conference Proceedings
1. Charge Transport in Low Stress Si-rich Silicon Nitride Thin Films
Habermehl, S. ; Carmignani, C.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A..  pp.107-112,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 687
2.

Conference Proceedings
Conference Proceedings
2. Fabrication techniques for low-loss silicon nitride waveguides
Shaw, M.J. ; Guo, J. ; Vawter, G.A. ; Habermehl, S. ; Sullivan, C.T.
Pub. info.: Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA.  pp.109-118,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5720
3.

Conference Proceedings
Conference Proceedings
3. Onset of Dielectric Breakdown in LPCVD Silicon Oxynitride Thin Films
Habermehl, S. ; Apodaca, R.T.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.363-374,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
4.

Conference Proceedings
Conference Proceedings
4. Properties of low residual stress silicon oxynitrides used as a sacrificial layer
Habermehl, S. ; Glenzinski, A. K. ; Halliburton, W. M. ; Sniegowski, J. J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.49-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605