E. Sugiura ; H. Watanabe ; T. Imoriya ; Y. Todokoro
Pub. info.:
14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California. pp.247-258, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical materials technology for energy efficiency and solar energy conversion XIV : 12-13 July 1995, San Diego, California. pp.42-50, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California. pp.290-301, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
H. Sumitani ; K. Itoga ; M. Inoue ; H. Watanabe ; N. Yamamoto
Pub. info.:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V : 20-21 February 1995, Santa Clara, California. pp.94-103, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Y. Yamaguchi ; H. Tsu ; T. Kawakami ; H. Watanabe ; A.B. Kahle
Pub. info.:
Advanced and next-generation satellites : 25-28 September 1995, Paris, France. pp.41-50, 1996. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced and next-generation satellites : 25-28 September 1995, Paris, France. pp.26-40, 1996. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering