1.

Conference Proceedings
Conference Proceedings
1. MEASUREMENT OF VISCOELASTIC STRESS RELIEF IN PATTERNED SILICON-ON-INSULATOR COMPOSITE STRUCTURES WITH RAMAN SPECTROSCOPY
Letavic, T. J. ; Maby, E. W. ; Gutmann, R. J. ; Petruzzello, J.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.201-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
2.

Conference Proceedings
Conference Proceedings
2. Investigations of the Chemical-Mechanical Polishing of Polymer Films for ILD Applications
Neirynck, Jan M. ; Murarka, S. P. ; Gutmann, R. J.
Pub. info.: Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A..  pp.229-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 381
3.

Conference Proceedings
Conference Proceedings
3. CHEMICAL-MECHANICAL POLISHING OF TUNGSTEN WITH HOLOGEN-BASED SLURRIES
Yang, K. ; Gutmann, R. J. ; Murarka, S. P. ; Stonebaker, E. ; Atkins, H.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.145-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
4.

Conference Proceedings
Conference Proceedings
4. Bias-temperature-stress induced mobility improvement in 4H-SiC MOSFETs
Chatty, K. ; Chow, T. P. ; Gutmann, R. J. ; Arnold, E. ; Alok, D.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.63-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572
5.

Conference Proceedings
Conference Proceedings
5. SURFACE LAYER FORMATION DURING THE CHEMICAL MECHANICAL POLISHING OF COPPER THIN FILMS
Steigerwald, J. M. ; Murarka, S. P. ; Duquette, D. J. ; Gutmann, R. J.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.133-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337