1.

Conference Proceedings
Conference Proceedings
1. Optimization of the Ion-Cut Process in Si and SiC
Holland, O.W. ; Thomas, D.K. ; Gregory, R.B.
Pub. info.: Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 647
2.

Conference Proceedings
Conference Proceedings
2. Evaluation Of Candidate Metals For Dual-Metal Gate Cmos With Hfo_2 Gate Dielectric
Samavedam, S.B. ; Schaeffer, J.K. ; Gilmer, D.C. ; Dhandapani, V. ; Tobin, P.J. ; Mogab, J. ; Nguyen, B-Y. ; Dakshina-Murthy, S. ; Rai, R.S. ; Jiang, Z-X. ; Martin, R. ; Raymond, M.V. ; Zavala, M. ; La, L.B. ; Smith, J.A. ; Gregory, R.B.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.85-90,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
3.

Conference Proceedings
Conference Proceedings
3. Theoretical And Experimental Analysis Of The Low Dielectric Constant Of Fluorinated Silica
Demkov, A.A. ; Zollner, S. ; Liu, R. ; Werho, D. ; Kottke, M. ; Gregory, R.B. ; Angyal, M. ; Filipiak, S. ; Adams, G.B.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D3.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612