1.

Conference Proceedings
Conference Proceedings
1. Monomeric chelated amides of aluminum and gallium: Volatile, miscible liquid precursors for CVD
Barray, Sean T. ; Gordon, Roy G. ; Wagner, Valerie A.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.83-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
2.

Conference Proceedings
Conference Proceedings
2. Volatile liquid precursors for the chemical vapor deposition (CVD) of thin films containing alkali metals
Broomhall-Dillard, Randy N. R. ; Gordon, Roy G. ; Wagner, Valerie A.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.139-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
3.

Conference Proceedings
Conference Proceedings
3. Alternating Layer Chemical Vapor Deposition (ALD) of Metal Silicates and Oxides for Gate Insulators
Gordon, Roy G. ; Becker, Jill ; Hausmann, Dennis ; Suh, Seigi
Pub. info.: Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2002.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 670