Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.68-79, 1999. Pennington, N.J.. Electrochemical Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1050-1063, 1998. Pennington, NJ. Electrochemical Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1373-1384, 1998. Pennington, NJ. Electrochemical Society
Ploessl, A. ; Scholz, R. ; Bagdahn, J. ; Stenzel, H. ; Tu, K.N. ; Goesele, U.M.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1361-1372, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.920-930, 1994. Pennington, NJ. Electrochemical Society