1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL ACTIVATION OF HEAVILY DOPED ARSENIC IMPLANTED SILICON
Said, J. ; Jaouen, H. ; Ghibaudo, G. ; Stoemenos, I. ; Zaumseil, P.
Pub. info.: Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.599-604,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 128
2.

Conference Proceedings
Conference Proceedings
2. DEFECTS CHARACTERIZATION OF ARSENIC IMPLATED SILICON BY AC HALL EFFECT MEASUREMENTS
Jaouen, H. ; Ghibaudo, G. ; Christofides, C.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.167-172,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71