1.

Conference Proceedings

Conference Proceedings
Otto,T. ; Saupe,R. ; Bruch,R.F. ; Fritzsch,U. ; Stock,V. ; Gessner,T. ; Afanasyeva,N.I.
Pub. info.: Subsurface and surface sensing technologies and applications III : 30 July-1 August 2001, San Diego, USA.  pp.234-242,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4491
2.

Conference Proceedings

Conference Proceedings
Otto,T. ; Stock,V. ; Schmidt,W.D. ; Liebold,K. ; Fassler,D. ; Wollina,U. ; Fritzsch,U. ; Gessner,T.
Pub. info.: Subsurface and surface sensing technologies and applications III : 30 July-1 August 2001, San Diego, USA.  pp.203-214,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4491
3.

Conference Proceedings

Conference Proceedings
Kurth,S. ; Hiller,K. ; Zichner,N. ; Mehner,J. ; Iwert,T. ; Biehl,S. ; Dotzel,W. ; Gessner,T.
Pub. info.: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA.  pp.103-111,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4559
4.

Conference Proceedings

Conference Proceedings
Gessner,T. ; Kurth,S. ; Kaufmann,C. ; Markert,J. ; Ehrlich,A. ; Dotzel,W.
Pub. info.: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA.  pp.338-347,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4178
5.

Conference Proceedings

Conference Proceedings
Otto,T. ; Schubert,A. ; Bohm,J. ; Gessner,T.
Pub. info.: Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA.  pp.96-106,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4179