Subsurface and surface sensing technologies and applications III : 30 July-1 August 2001, San Diego, USA. pp.234-242, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Subsurface and surface sensing technologies and applications III : 30 July-1 August 2001, San Diego, USA. pp.203-214, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA. pp.103-111, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.338-347, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA. pp.96-106, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering