1.

Conference Proceedings
Conference Proceedings
1. In-situ Rapid Thermal N20 Oxidation of NH3-Nitrided Si for Ultrathin Nitride/Oxide Stack Gate Formation
Kim, Y.H. ; Song, S.C. ; Luan, H.F. ; Gelpey, J.C. ; Kepton, A. ; Levy, S. ; Bloom, R. ; Kwong, D.-L.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.239-246,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
2.

Conference Proceedings
Conference Proceedings
2. Advanced Annealing for Sub-130 nm Junction Formation
Gelpey, J.C. ; Elliott, K. ; Gamin, D. ; McCoy, S. ; Ross, J. ; Downey, D.F. ; Arevalo, E.A.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.313-324,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11