1.

Conference Proceedings
Conference Proceedings
1. Anti-bubble topcoat for immersion lithography
Paulsson, A. ; Xing, K. ; Fosshaug, H. ; Lundvall, A. ; Bjornberg, C. ; Karlsson, J.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.527-536,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Some aspects on mechanisms responsible for contamination of optical components in DUV lithographic exposure tools
Fosshaug, H. ; Ekberg, M. ; Kylberg, G.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1601-1628,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754