1.

Conference Proceedings
Conference Proceedings
1. RAMAN SPECTROSCOPY ANALYSIS OF NITROGEN ION IMPLANTATION IN SILICON AND CORRELATION WITH TRANSMISSION ELECTRON MICROSCOPY
Perez-Rodriguez, A. ; Romano-Rodriguez, A. ; Morante, J.R. ; Esteve, J. ; Montserrat, J.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.177-182,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Stress in Hydrogenated Microcrystalline Silicon Thin Films
Bertomeu, J. ; Esteve, J. ; Martinez, E. ; Peiro, D. ; reu, J. ; Voz, C.
Pub. info.: Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.537-542,  1999.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 557
3.

Conference Proceedings
Conference Proceedings
3. Effects of Substrate Bias on the Nucleation of Diamond Films Studied by Atomic Force Microscopy
Sanchez, G. ; Polo, M. C. ; Wang, W. L. ; Esteve, J.
Pub. info.: Diamond for electronic applications.  pp.187-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 416
4.

Conference Proceedings
Conference Proceedings
4. MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON
Romano-Rodriguez, A. ; El-Hassani, A. ; Perez-Rodriguez, A. ; Samitier, J. ; Morante, J. R. ; Esteve, J. ; Acero, M. C.
Pub. info.: Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.361-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 308
5.

Conference Proceedings
Conference Proceedings
5. Synthesis of Thin Membranes in Si Technology by Carbon Ion Implantation
Serre, C. ; Perez-Rodriguez, A. ; Calvo-Barrio, L. ; Romano-Rodriguez, A. ; Morante, J. R. ; Esteve, J. ; Acero, M. C. ; Skorupa, W. ; Kogler, R.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.727-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396