1.

Conference Proceedings

Conference Proceedings
Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.143-146,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings

Conference Proceedings
Clark, W. ; Bushnell, A. ; Dunn, J. ; Ott, T.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997