1.

Conference Proceedings
Conference Proceedings
1. Friction and Durability of Chemisorbed Organic Lubricants for Microelectromechanical Systems
Dugger, M. T. ; Senft, D. C. ; Nelson, G. C.
Pub. info.: Microstructure and microtribology of polymer surfaces.  pp.455-,  2000.  Washington, D. C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 741
2.

Conference Proceedings
Conference Proceedings
2. Chemical vapor deposition coating for micromachines
Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; Dugger, M. T.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.21-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616