Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.111-116, 1988. Pittsburgh, Pa.. Materials Research Society
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.317-322, 1988. Pittsburgh, Pa.. Materials Research Society