1.

Conference Proceedings
Conference Proceedings
1. Back to square 9: a demonstration of 9-in. reticle capability
Cummings, K.D. ; Schneider-Stoermann, L.U. ; Buttgereit, U. ; Irmscher, M. ; Mueller, D. ; Hudek, P. ; Beyer, D. ; Brendel, B. ; Whittey, J.M. ; Eynon, B.G. ; Harsch, J. ; Constantine, C. ; Miller, K.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.15-24,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
2.

Conference Proceedings
Conference Proceedings
2. Aberration determination in early 157-nm exposure system
Smith, B.W. ; Conley, W. ; Garza, C.M. ; Meute, J. ; Miller, D.A. ; Rich, G.K. ; Graffenberg, V. ; Dean, K.R. ; Patel, S. ; Ford, A. ; Foster, J. ; Moers, M.H. ; Cummings, K.D. ; Webb, J.E. ; Dewa, P.G. ; Zerrade, A. ; McDonald, S.S. ; Hughes, G.P. ; Dirksen, P.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1635-1643,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. Effects of reticle reflectance on lithography
Cummings, K.D. ; Geh, B. ; Lu, B. ; Wasson, J.R. ; Weisbrod, E. ; Dauksher, W.J. ; Nordquist, K.J. ; Mangat, P.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.256-265,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
4.

Conference Proceedings
Conference Proceedings
4. Application of rigorous electromagnetic simulation to SLM-based maskless lithography for 65-nm node
Croffie, E.H. ; Eib, N. ; Callan, N.P. ; Baba-Ali, N. ; Latypov, A. ; Hintersteiner, J. ; Sandstrom, T. ; Bleeker, A. ; Cummings, K.D.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.842-850,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256