1.

Conference Proceedings
Conference Proceedings
1. PARTICLE REMOVAL EFFICIENCY OF DILUTED HF SOLUTIONS
Alessandri, M. ; Bellandi, E. ; Pipia, F. ; Crivelli, B. ; Wolke, K. ; Schenkl, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.523-527,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. Nitridation by NO or N2O of Si-SiO2 Interfaces
Caricato, A. P. ; Cazzaniga, F. ; Cerofolini, G. F. ; Crivelli, B. ; Polignano, M. L. ; Tallarida, G. ; Valeri, S. ; Zonca, R.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.135-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567