1.

Conference Proceedings
Conference Proceedings
1. COMPOSITION ANALYSIS OF RF PLASMA-DEPOSITED AMORPHOUS SILICON OXYNITRIDE THIN FILMS BY SPECTROSCOPIC PHASE-MODULATED ELLIPSOMETRY
Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Costa, J. ; Bertran, E.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.351-356,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. PRODUCTION OF SILICON POWDER BY SQUARE-WAVE MODULATED RF SILANE PLASMA
Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.
Pub. info.: Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A..  pp.155-160,  1993.  Pittsburg, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 286
3.

Conference Proceedings
Conference Proceedings
3. MICROSTRUCTURAL AND VIBRATIONAL CHARACTERIZATION OF THE HYDROGENATED AMORPHOUS SILICON POWDERS
Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.1031-1036,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
4.

Conference Proceedings
Conference Proceedings
4. Real Time Ellipsometric Study of Boron Nitride Thin Film Growth
Bertran, E. ; Canillas, A. ; Campmany, J. ; Kasmi, M. El ; Pascual, E. ; Costa, J. ; Andujar, J. L.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.307-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410
5.

Conference Proceedings
Conference Proceedings
5. Thermal Desorption of Hydrogen in Si and SiC Nanoparticles Produced by Plasma-Enhanced Chemical Vapor Deposition
Costa, J. ; Fort, J. ; Sunol, J. J. ; Roura, P. ; Viera, G. ; Bertran, E.
Pub. info.: Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.427-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 513
6.

Conference Proceedings
Conference Proceedings
6. Structural Characterization and Crystallization Process of Nanostructured Silicon Thin Films Produced in Low-Pressure Silane Plasma
Viera, G. ; Cabarrocas, P. Roca i ; Costa, J. ; Martinez, S. ; Bertran, E.
Pub. info.: Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A..  pp.933-,  1999.  Warrendale.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 507
7.

Conference Proceedings
Conference Proceedings
7. IR-VISIBLE PHOTOLUMINESCENCE STUDY OF NANOMETER-SIZE AMORPHOUS SILICON POWDER PRODUCED BY SQUARE-WAVE-MODULATED RF GLOW DISCHARGE
Costa, J. ; Roura, P. ; Sardin, G. ; Morante, J. R. ; Bertran, E.
Pub. info.: Molecularly designed ultrafine/nanostructured materials : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.405-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 351
8.

Conference Proceedings
Conference Proceedings
8. Deposition of Nanostructured Silicon Thin Films by Means of the Selective Contribution of Particles in PECVD
Costa, J. ; Roura, P. ; Cabarrocas, P. Roca i ; Viera, G. ; Bertran, E.
Pub. info.: Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A..  pp.499-,  1999.  Warrendale.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 507
9.

Conference Proceedings
Conference Proceedings
9. Production of a-Si1-xCx:H Powders Using Radiofrequency Glow Discharges of Silane and Methane Mixtures
Costa, J. ; Viera, G. ; Zhang, R. Q. ; Andujar, J. L. ; Pascual, E. ; Bertran, E.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.173-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410