1.

Conference Proceedings

Conference Proceedings
Gates, S. ; Chen, S.T. ; Chen, X. ; Cohen, S. ; Edelstein, D. ; Fitzsimmons, J. ; Hedrick, J. ; Restaino, D. ; Ryan, J. ; Simonyi, E. ; Purushothaman, S.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.31-39,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
2.

Conference Proceedings

Conference Proceedings
Kiefer, R. ; Jackson, C. ; Garg, V. ; Mellenthin, D. ; Manfredo, J. ; Buck, P. ; Cohen, S. ; Morgante, C. ; Allen, P. C. ; White, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.315-326,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings

Conference Proceedings
Tyberg, C. ; Huang, E. ; Hedrick, J. ; Simonyi, E. ; Gates, S. ; Cohen, S. ; Malone, K. ; Wickland, H. ; Sankarapandian, M. ; Toney, M. ; Kim, H.-C. ; Miller, R. ; Volksen, W. ; Rice, P. ; Lurio, L.
Pub. info.: Polymers for microelectronics and nanoelectronics.  pp.161-172,  2004.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 874
4.

Technical Paper

Technical Paper
Preciado, J. A. ; Cohen, S. ; Skandakumaran, P. ; Rubinsky, B.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : IMECE
Ser. no.: 2003
5.

Conference Proceedings

Conference Proceedings
Jackson, C. ; Kiefer, R. ; Buck, P. ; Mellenthin, D. ; Manfredo, J. ; Garg, V. ; Hickethier, J. ; Cohen, S. ; Morgante, C. ; Allen, P. C. ; Christenson, E. ; White, M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.387-397,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
6.

Conference Proceedings

Conference Proceedings
Cohen, S. ; Gilboa, F. ; Shani, U.
Pub. info.: Medical Imaging 2002: PACS and Integrated Medical Information Systems: Design and Evaluation.  pp.288-298,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4685
7.

Conference Proceedings

Conference Proceedings
Jackson, C.A. ; Buck, P.D. ; Cohen, S. ; Garg, V. ; Hickethier, J. ; Howard, C.H. ; Kiefer, R.M. ; Lamantia, M.J. ; Manfredo, J.C. ; Tsou, J.G.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.67-75,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
8.

Conference Proceedings

Conference Proceedings
Jackson, C.A. ; Buck, P. ; Cohen, S. ; Garg, V. ; Howard, C. ; Kiefer, R. ; Manfredo, J. ; Tsou, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.30-41,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
9.

Conference Proceedings

Conference Proceedings
Jackson, C.A. ; Buck, P. ; Cohen, S. ; Garg, V. ; Howard, C. ; Kiefer, R.M. ; Manfredo, J. ; Tsou, J.
Pub. info.: Optical Microlithography XVII.  pp.1005-1016,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377