1.

Conference Proceedings
Conference Proceedings
1. USING RAPID THERMAL PROCESSING TO INDUCE EPITAXIAL ALIGNMENT OF POLYCRYSTALLINE SILICON FILMS ON (100) SILICON
Harrison, H.B. ; Johnson, S.T. ; Komem, Y. ; Wong, C. ; Cohen, S.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.455-458,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Conference Proceedings
Conference Proceedings
2. DLTS CHARACTERIZATION OF N-TYPE SILICON AFTER RAPID THERMAL ANNEALING OF BORON IMPLANTATION
Ransom, C.M. ; Sedgwick, T.O. ; Cohen, S.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.153-156,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52