Koester, S. J. ; Chu, J. O. ; Saenger, K. L. ; Ouyang, Q. C. ; Ott, J. A. ; Canaperi, D. F. ; Tornello, J. A. ; Jahnes, C. V. (IBM)
Pub. info.:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.449-458, 2004. Pennington, N.J.. Electrochemical Society
Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A.. pp.9-14, 2003. Warrendale, PA. Materials Research Society
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.141-146, 2003. Warrendale, Pa.. Materials Research Society