1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL AND MISCROSTRUCTURAL CHARACTERISTICS OF Ti CONTACTS ON (001) Si
Liauh, H. R. ; Chen, M. C. ; Chen, J. F. ; Chen, L. J.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.635-640,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. SILICIDE FORMATION BY RAPID THERMAL PROCESSING
Chen, L. J. ; Lur, W. ; Chen, J. F. ; Lee, T. L. ; Liang, J. M.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.99-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
3.

Conference Proceedings
Conference Proceedings
3. SOLID STATE AMORPHIZATION IN SILICIDE-FORMING SYSTEMS
Chen, L. J. ; Hsieh, W. Y. ; Lin, J. H. ; Lee, T. L. ; Chen, J. F. ; Liang, J. M. ; Wang, M. H.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.343-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
4.

Conference Proceedings
Conference Proceedings
4. Halftone biasing OPC technology: an approach for achieving fine bias control on raster-scan systems
Nakagawa, K. H. ; Chen, J. F. ; Socha, R. J. ; Laidig, T. L. ; Wampler, K. E. ; Van Den Broeke, D. ; Dusa, M. V. ; Caldwell, R. F.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.315-323,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748