1.

Conference Proceedings
Conference Proceedings
1. High-performance Integration of Copper Interconnects with Low-k Hydrogen Silsesquioxane Employing Deuterium Plasma Treatment
Liu, P.-T. ; Chang, T.-C. ; Yang, Y.L. ; Cheng, Y.F. ; Lee, J.K. ; Shih, F.Y. ; Tsai, E. ; Chen, G. ; Sze, S.M.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.251-260,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
2.

Conference Proceedings
Conference Proceedings
2. HF CONCENTRATION OF CONTROL IN IC MANUFACTURING
Kashkoush, Ismail ; Chen, G. ; Boelen, P. ; Geomini, M.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.252-257,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. II.16 Coupled Thermogravitational and Thermocapillary Convection in a Two-Layer Fluid System
Liu, Q. S. ; Chen, G. ; Roux, B.
Pub. info.: Proceedings of the VIIIth European Symposium on Materials and Fluid Sciences in Microgravity, Université Libre de Bruxelles, Belgium, 12-16 April 1992.  pp.227-232,  1992.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 333
4.

Conference Proceedings
Conference Proceedings
4. Instability of Thermocapillary Convection in Floating Zones
Chen, G. ; Roux, B.
Pub. info.: Proceedings of the VIIIth European Symposium on Materials and Fluid Sciences in Microgravity, Université Libre de Bruxelles, Belgium, 12-16 April 1992.  pp.73-78,  1992.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 333
5.

Conference Proceedings
Conference Proceedings
5. Extraction of thermal parameters of microbolometer infrared detectors using electrical measurement
Karunasiri, G. ; Gu, X. ; Chen, G. ; Sridhar, U.
Pub. info.: Infrared technology and applications XXIV : 19-24 July 1998, San Diego, California.  Part 2  pp.668-674,  1998.  Bellingham, Wash., USA.  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3436
6.

Conference Proceedings
Conference Proceedings
6. Difference Between Wafer Temperature and Thermocouple Reading During Rapid Thermal Processing
Borca-Tasciuc, T. ; Achimov, D. A. ; Chen, G.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.103-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
7.

Conference Proceedings
Conference Proceedings
7. Experimental Study of the Effect of the Quantum Well Structures on the Thermoelectric Figure of Merit in Si/Si1-xGex System
Sun, X. ; Liu, J. ; Cronin, S. B. ; Wnag, K. L. ; Chen, G. ; Koga, T. ; Dresselhaus, M. S.
Pub. info.: Thermoelectric materials, 1998--the next generation materials for small-scale refrigeration and power generation applications : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.369-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 545
8.

Conference Proceedings
Conference Proceedings
8. Thermal Conductivity and Phonon Engineering in Low-Dimensional Structures
Chen, G. ; Volz, S. G. ; Borca-Tasciuc, T. ; Zeng, T. ; Song, D. ; Wang, K. L. ; Dresselhaus, M. S.
Pub. info.: Thermoelectric materials, 1998--the next generation materials for small-scale refrigeration and power generation applications : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.357-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 545
9.

Conference Proceedings
Conference Proceedings
9. Hot Electron Effects on Thermionic Emission Cooling in Heterostructures
Zeng, T. ; Chen, G.
Pub. info.: Thermoelectric materials, 1998--the next generation materials for small-scale refrigeration and power generation applications : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.467-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 545
10.

Conference Proceedings
Conference Proceedings
10. Anisotropic Thermal Conductivity of a Si/Ge Superlattice
Borca-Tasciuc, T. ; Song, D. ; Liu, J. L. ; Chen, G. ; Wang, K. L. ; Sun, X. ; Dresselhaus, M. S. ; Radetic, T. ; Gronsky, R.
Pub. info.: Thermoelectric materials, 1998--the next generation materials for small-scale refrigeration and power generation applications : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.473-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 545