1.

Conference Proceedings
Conference Proceedings
1. Attainment of Low Resistivity Polycide Films Using Rapid Thermal Annealing
Yoon, H.A. ; Chen, C. ; Singhal, A. ; Lapes, D. ; Miner, G. ; Hong, S. ; Yamazaki, M. ; Maeda, Y.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.249-256,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Enabling Single-Wafer Process Technologies for Reliable Ultra-Thin Gate Dielectrics
Miner, G. ; Xing, G. ; Joo, H.S. ; Sonchez, F. ; Yokoa, Y. ; Chen, C. ; Lopes, D. ; Balakrishna, A.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.3-14,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10