1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF RIE SEQUENCE AND POST-RIE SURFACE PROCESSING ON THE RELIABILITY OF GATE OXIDE lN A TRENCH
Grebs, T. ; Ridley, R. ; Chang, K. ; Wu, C.-T. ; Agarwal, R. ; Mytych, J. ; Dimachkie, W. ; Dolny, G. ; Michalowicz, J. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.108-115,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
2.

Conference Proceedings
Conference Proceedings
2. REVERSING OF SILICON SURFACE AGING BY LAMP CLEANING
Shanmugasundaram, K. ; Chang, K. ; Shallenberger, J. ; Danel, A. ; Tardif, F. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.348-355,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
3.

Conference Proceedings
Conference Proceedings
3. STUDY OF THE EFFECT OF SILICON SURFCE TREATMENT ON EOT IN HIGH-k DIELECTRIC MOS GATE STACK
Chang, K. ; Shanmugasundaram, K. ; Lee, D.-O. ; Roman, P. ; Shallenberger, J. ; Chang, F.-M. ; Wang, J. ; Beck, R. ; Mumbauer, P. ; Grant, R. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.78-85,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
4.

Conference Proceedings
Conference Proceedings
4. Phased-array radar for airborne systems
Tahim, R.S. ; Foshee, J.J. ; Chang, K.
Pub. info.: Sensors, and command, control, communications, and intelligence (C31) technologies for homeland defense and law enforcement II : 21-25 April 2003, Orlando, Florida, USA.  pp.421-432,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5071
5.

Conference Proceedings
Conference Proceedings
5. HRTEM Study of the Extended Defect Structure in Epitaxial Ba0.3Sr0.7TiO3 Thin Films Grown on (001) LaAlO3
Lu, C.J. ; Bendersky, L.A. ; Chang, K. ; Takeuchi, I.
Pub. info.: Structure-property relationships of Oxide surfaces and interfaces II : symposium held December 2-3, 2002, Boston, Massachusetts, U.S.A..  pp.37-42,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 751
6.

Technical Paper
Technical Paper
6. The Design and Development of an Explosion Resistant Luggage Container.
Fu, R. ; Fingerhut, R. ; Fingerhut, S. ; Scott, B. ; Chang, K.
Pub. info.: SME technical paper.  2003.  Society of Manufacturing Engineers