1.

Conference Proceedings
Conference Proceedings
1. Synthesis of pure C40 TiSi2 for Si wafer fabrication
Chen,S.Y. ; Shen,Z.X. ; Xu,S.Y. ; See,A.K. ; Chan,L.H. ; Li,W.S.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.272-275,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
2.

Conference Proceedings
Conference Proceedings
2. Steep retrograde indium channel profiling for high-performance nMOSFETs device fabrication
Ong,S.Y. ; Chor,E.F. ; Leung,Y.K. ; Lee,J. ; Li,W.S. ; See,A. ; Chan,L.H.
Pub. info.: Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore.  pp.270-278,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4228
3.

Conference Proceedings
Conference Proceedings
3. Effects of process parameters on pattern-edge roughness of chemically amplified resists
Koh,H.P. ; Lin,Q.Y. ; Hu,X. ; Chan,L.H.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.240-251,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999