1.

Conference Proceedings
Conference Proceedings
1. ROUGHNESS EFFECTS DURING FOCUSED ION BEAM REPAIR OF X-RAY MASKS WITH POLYCRYSTALLINE TUNGSTEN ABSORBERS
Kola, R.R. ; Celler, G.K. ; Harriott, L.R.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.593-598,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. INTRODUCTORY REMARKS - ALTERNATIVE MATERIAL SYSTEMS
Celler, G.K. ; Steckl, A.J.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1339-1340,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. REVIEW OF X-RAY LITHOGRAPHY
Celler, G.K.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.962-972,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10