1.

Conference Proceedings
Conference Proceedings
1. Structural and Optical Characterization of Polycrystalline Silicon Films Deposited by Single Wafer CVD
Sassela, A. ; Borghesi, A. ; Amore, G. ; Tallarida, G. ; Spiga, S. ; Cazzaniga, F. ; Ferroni, G. ; Queirolo, G.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1282-1288,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Evaluating the Denuded Zone Depth by Measurements of the Recombination Activity of Bulk Defects
Polignano, M. L. ; Brambilla, M. ; Cazzaniga, F. ; Pavia, G. ; Zanderigo, F. ; Spiga, S. ; Moro, L. ; Castaldini, A. ; Cavallini, A.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.569-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
3.

Conference Proceedings
Conference Proceedings
3. Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation
Sabbadini, A. ; Cazzaniga, F. ; Brambilla, M. ; Bresolin, C. ; Cusi, V. ; Marangon, T. ; Queirolo, G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.23-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. Novel Electromigration Failure Mechanism for Aluminum-Based Metallization on Titanium Substrate
Girardi, G. ; Caprile, C. ; Cazzaniga, F. ; Riva, L.
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.59-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516
5.

Conference Proceedings
Conference Proceedings
5. Nitridation by NO or N2O of Si-SiO2 Interfaces
Caricato, A. P. ; Cazzaniga, F. ; Cerofolini, G. F. ; Crivelli, B. ; Polignano, M. L. ; Tallarida, G. ; Valeri, S. ; Zonca, R.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.135-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567