1.

Conference Proceedings
Conference Proceedings
1. THE STRUCTURE OF OXYGEN-IMPLANTED SILICON BEFORE AND AFTER HEAT-PULSE ANNEALING
Liliental-Weber, Z. ; Carpenter, R.W. ; Kelly, J.C.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.139-144,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. NUCLEATION AND GROWTH OF OCTAHEDRAL OXIDE PARTICLES IN SILICON: OXYGEN ION IMPLANTATION
Carpenter, R.W. ; Vangerschaeve G. ; Vanker, C. J. ; Wilson, S.R.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.309-316,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59