1.

Conference Proceedings
Conference Proceedings
1. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.340-345,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
2.

Conference Proceedings
Conference Proceedings
2. Novel micropump actuated by thin film shape memory alloy
Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.369-375,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891