1.

Conference Proceedings
Conference Proceedings
1. Photon sieve array x-ray maskless nanolithography
G. Cheng ; T. Xing ; W. Lin ; J. Zhou ; C. Qiu ; Z. Liao ; Y. Yang ; L. Hong ; J. Ma
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
2.

Conference Proceedings
Conference Proceedings
2. Characterizations of microcantilever chemical sensors based on SOI material
F. Hu ; D. Wang ; C. Qiu ; A. Wang ; H. Gao
Pub. info.: MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China.  pp.68360S-1-68360S-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6836