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Conference Proceedings

1. IN-SITU DIAGNOSTICS OF DIAMOND CVD

Butler, J.E. ; Celii, F.G. ; Pehrsson, P.E. ; Wang, H.-t ; Nelson,H.H.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.259-262, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

Conference Proceedings

2. IN SITU CHARACTERIZATION OF THIN FILMS GROWTH BY FTIR IRRAS

Butler, J.E. ; Koller, K.B. ; Schmidt, W.A.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.276-280, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131