1.

Conference Proceedings
Conference Proceedings
1. Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide
Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.145-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS
Jebasinski, R. ; Mantl, S. ; Radermacher, K. ; Fichtner, P. ; Jager, W. ; Buchal, Ch.
Pub. info.: Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.411-416,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 201