Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.145-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Jebasinski, R. ; Mantl, S. ; Radermacher, K. ; Fichtner, P. ; Jager, W. ; Buchal, Ch.
Pub. info.:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.411-416, 1991. Pittsburgh, Pa.. Materials Research Society