Yang, M. ; Leiterer, J. ; Gatto, A. ; Kaiser, N. ; Hollein, I. ; Teuber, S. ; Bubke, K.
Pub. info.:
Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany. pp.59651L-, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Bubke, K. ; Alles, B ; Cotte, E. ; Sczyrba, M. ; Pierrat, C.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XIII. pp.628318-628318, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XII. pp.722-730, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XII. pp.10-19, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XII. pp.194-201, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering