1.

Conference Proceedings
Conference Proceedings
1. *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS: PHYSICAL MECHANISMS OF OXYGEN SEGREGATION
Jaussaud, C. ; Margail, J. ; Stoemenos, J. ; Bruel, M.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.17-28,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. 1-3 MeV B+ AND B+ IMPLANTS FOR C-MOS TECHNOLOGY
De Pontcharra, J. ; Spinelli, P. ; Bruel, M.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.115-122,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
3.

Conference Proceedings
Conference Proceedings
3. *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS PHYSICAL MECHANISMS OF OXYGEN SEGREGATION
Jaussaud, C. ; Margail, J. ; Stoemenos, J. ; Bruel, M.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.17-28,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100
4.

Conference Proceedings
Conference Proceedings
4. IMPLANTATION INDUCED FILAMENTARY STRUCTURES
Jaussaud, C. ; Maillot, B. ; Bruel, M.
Pub. info.: Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.223-228,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 27
5.

Conference Proceedings
Conference Proceedings
5. OUTGASSING OF PHOTORESIST DURING ION IMPLANTATION
Roche,. D. ; Michaud, J. F. ; Bruel, M.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.203-210,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45