1.

Conference Proceedings
Conference Proceedings
1. Gate oxide Integrity Response as a Function of Near the Surface Crystal Defects Morphology
Borionetti, G. ; Godio, P. ; Bonoli, F. ; Comara, M. ; Orizio, R. ; Falster, R.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.456-466,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. COPs/particles discrimination using an automated surface inspection tool
Lorenzi, G. ; Nguyen, K.H. ; Sanna, C. ; Orizio, R. ; Borionetti, G.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.39-49,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041